MEMS with integrated CMOS read-out circuit based on sub-micrometric cantilevers array for multiple sensing

Maria Villarroya; Jaume Verd; Jordi Teva; Gabriel Abadal; Eduard Figueras; Francesc Perez-Murano; Jaume Esteve; Nuria Barniol

doi:10.1117/12.608354

1 July 2005 MEMS with integrated CMOS read-out circuit based on sub-micrometric cantilevers array for multiple sensing (Invited Paper)

Maria Villarroya, Jaume Verd, Jordi Teva, Gabriel Abadal, Eduard Figueras, Francesc Perez-Murano, Jaume Esteve, Nuria Barniol

Author Affiliations +

Proceedings Volume 5836, Smart Sensors, Actuators, and MEMS II; (2005) https://doi.org/10.1117/12.608354
Event: Microtechnologies for the New Millennium 2005, 2005, Sevilla, Spain

Abstract

A Micro Electro Mechanical System (MEMS) for mass detection is presented. It has been developed by the monolithic integration of the mechanical transducer with the CMOS control circuit. The sensor transducer consists on an array of four resonating cantilevers; oscillation is achieved by electrostatic excitation. The independent control on each cantilever of the arrays allows multiple sensing on a single device. The microresonators are fabricated on polysilicon in a compatibilized process with the front-end CMOS circuitry. The readout of the cantilevers oscillation is achieved by a current amplifier. Expected Mass resolution in air is 80 ag/Hz.

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Maria Villarroya, Jaume Verd, Jordi Teva, Gabriel Abadal, Eduard Figueras, Francesc Perez-Murano, Jaume Esteve, and Nuria Barniol "MEMS with integrated CMOS read-out circuit based on sub-micrometric cantilevers array for multiple sensing (Invited Paper)", Proc. SPIE 5836, Smart Sensors, Actuators, and MEMS II, (1 July 2005); https://doi.org/10.1117/12.608354

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