Towards the realization of a multielectrode field emission device: controlled growth of single wall carbon nanotube arrays

F. Brunetti; A. Di Carlo; R. Riccitelli; A. Reale; P. Regoliosi; M. Lucci; A. Fiori; M. L. Terranova; S. Orlanducci; V. Sessa; A. Ciorba; M. Rossi; M. Cirillo; V. Merlo; P. Lugli; C. Falessi

doi:10.1117/12.609382

28 June 2005 Towards the realization of a multielectrode field emission device: controlled growth of single wall carbon nanotube arrays

F. Brunetti, A. Di Carlo, R. Riccitelli, A. Reale, P. Regoliosi, M. Lucci, A. Fiori, M. L. Terranova, S. Orlanducci, V. Sessa, A. Ciorba, M. Rossi, M. Cirillo, V. Merlo, P. Lugli, C. Falessi

Author Affiliations +

Proceedings Volume 5838, Nanotechnology II; (2005) https://doi.org/10.1117/12.609382
Event: Microtechnologies for the New Millennium 2005, 2005, Sevilla, Spain

Abstract

We reported the design and realization of a carbon nanotube-based integrated multielectrode device. Patterned Si/SiO₂/Nb/Nb₂O₅ multilayer was successfully realized by means of a few, common photolithographic processes with the minimum number of mask alignment steps. Such structure constitutes the patterned substrate of successive Hot Filament Chemical Vapour Deposition (HFCVD) process. Selective growth of highly oriented SWCNT arrays was obtained in the predefined locations while survival of the entire structure was achieved. Field emission measurements of such materials were carried out. Good and reproducible field emission behaviour has been observed in several realized structures.

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F. Brunetti, A. Di Carlo, R. Riccitelli, A. Reale, P. Regoliosi, M. Lucci, A. Fiori, M. L. Terranova, S. Orlanducci, V. Sessa, A. Ciorba, M. Rossi, M. Cirillo, V. Merlo, P. Lugli, and C. Falessi "Towards the realization of a multielectrode field emission device: controlled growth of single wall carbon nanotube arrays", Proc. SPIE 5838, Nanotechnology II, (28 June 2005); https://doi.org/10.1117/12.609382

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