Phase-shifting laser diode interferometry with equal phase steps using a Fabry-Perot cavity

Youichi Bitou; Hajime Inaba; Feng-Lei Hong; Toshiyuki Takatsuji; Atsushi Onae

doi:10.1117/12.613881

18 August 2005 Phase-shifting laser diode interferometry with equal phase steps using a Fabry-Perot cavity

Youichi Bitou, Hajime Inaba, Feng-Lei Hong, Toshiyuki Takatsuji, Atsushi Onae

Proceedings Volume 5879, Recent Developments in Traceable Dimensional Measurements III; 58790Y (2005) https://doi.org/10.1117/12.613881
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

A phase-shifting interferometer (PSI) with equal phase steps, using a frequency-tunable diode laser and a Fabry-Perot cavity, is proposed for the Carre algorithm. The measurement accuracy of the Carre algorithm depends on the equality of the phase steps. Using the Fabry-Perot cavity as a highly stable optical frequency reference, a high degree of phase step equality can be realized in the PSI with an optical frequency shift. Our experimental scheme realizes an optical frequency step equality higher than 2.1×10^-5 and a measurement repeatability of λ/850.

Citation Download Citation

Youichi Bitou, Hajime Inaba, Feng-Lei Hong, Toshiyuki Takatsuji, and Atsushi Onae "Phase-shifting laser diode interferometry with equal phase steps using a Fabry-Perot cavity", Proc. SPIE 5879, Recent Developments in Traceable Dimensional Measurements III, 58790Y (18 August 2005); https://doi.org/10.1117/12.613881

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