Stress analysis of transferred thin-GaN LED by Au-Si wafer bonding

S. C. Hsu; C. Y. Liu

doi:10.1117/12.615677

14 September 2005 Stress analysis of transferred thin-GaN LED by Au-Si wafer bonding

S. C. Hsu, C. Y. Liu

Proceedings Volume 5941, Fifth International Conference on Solid State Lighting; 594116 (2005) https://doi.org/10.1117/12.615677
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

Nowadays, the high power GaN-based LED has attracted serious attention for the lighting application. One of key issues for high power GaN-base LED to achieve sufficient lighting efficiency over the traditional light sources, such as, white incandescent and halogen light bulb is the efficiency of heat dissipation. Typically, GaN epi-layer is grown on sapphire substrates. The poor thermal conductivity of sapphire substrate has been identified to be the main limitation for the application of high power GaN LED. To improve the heat dissipation and lighting efficiency, we report a thin GaN structure by using Au-Si wafer bonding and Laser lift-off (LLO) technique. The GaN wafer was first deposited with a Au bonding layer and bonded onto a good thermal conduction substrate, i.e., heavy-doped Si. Then, 248nm KrF excimer Laser was used to strip the original sapphire substrate. To assure a successful GaN epi-layer transferring, Raman spectrum on the transferred GaN layer was performed and the result shows no quality change in the transferred GaN layer. In this work, we also fabricated the vertical LED devices on the transferred GaN epi-layer. Therefore, L-I-V result was obtained which will be presented in this talk. Moreover, we will discuss the effects and advantages of Au-Si bonding on the efficiency of lighting.

Citation Download Citation

S. C. Hsu and C. Y. Liu "Stress analysis of transferred thin-GaN LED by Au-Si wafer bonding", Proc. SPIE 5941, Fifth International Conference on Solid State Lighting, 594116 (14 September 2005); https://doi.org/10.1117/12.615677

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available