Paper
7 February 2006 Study of laser interaction with aluminum contaminant on fused silica
Author Affiliations +
Abstract
One of the major issues met in the operating of high power lasers concerns the cleanliness of laser components. In this context, in order to assess laser-induced damage in presence of metallic particulate contamination, we study the behaviour of aluminum on a silica substrate. Model samples containing calibrated aluminum square dots of 50 x 50 μ2 have been deposited by photolithography on a silica substrate. The sample was irradiated by a Nd:YAG laser at 1064 nm with different fluences and also different numbers of shots on each dot. Then the initial aluminum dot zone and the surrounding silica were analyzed using Nomarski microscopy, profilometry and photothermal microscopy. Laser fluence is revealed to be a very important parameter for the behaviour of aluminum dots. For example, it is possible to find a fluence of irradiation where aluminum dots are blown off the substrate and only small modifications occur to silica. In this case, increasing the number of shots doesn't significantly affect the silica surface.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
S. Palmier, I. Tovena, L. Lamaignère, J.L. Rullier, J. Capoulade, B. Bertussi, J.Y. Natoli, and L. Servant "Study of laser interaction with aluminum contaminant on fused silica", Proc. SPIE 5991, Laser-Induced Damage in Optical Materials: 2005, 59910R (7 February 2006); https://doi.org/10.1117/12.639141
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Cited by 7 scholarly publications.
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KEYWORDS
Aluminum

Silica

Absorption

Microscopy

Laser induced damage

Microscopes

Optical lithography

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