Advanced reticle inspection challenges and solutions for 65nm node

Won D. Kim; Mark D. Eickhoff; David Kim; Sandy McCurley

doi:10.1117/12.632322

4 November 2005 Advanced reticle inspection challenges and solutions for 65nm node

Won D. Kim, Mark D. Eickhoff, David Kim, Sandy McCurley

Proceedings Volume 5992, 25th Annual BACUS Symposium on Photomask Technology; 59920C (2005) https://doi.org/10.1117/12.632322
Event: SPIE Photomask Technology, 2005, Monterey, California, United States

Abstract

Silicon Technology Development for the ITRS 65nm-node is in the final stage of an intense 2-year cycle with the full-entitlement technology qualification by the end of 2005. Accordingly, reticle technology development in support of the 65nm-node has advanced a great deal since the initial efforts began several years ago. One of the most challenging aspects of 65nm-node mask technology development is the mask inspection, which is also the main cost-driver for the 65nm-node reticle technology. As a result, controlling 65nm-node reticle cost via leveraging advanced mask inspection technologies has become a leading factor in enabling prolonged success of the 65-nm node technology for years to come. With this paper, we report our closing work on reticle inspection capability development for the 65nm-node process technology development cycle for a full-volume production ramp.

Citation Download Citation

Won D. Kim, Mark D. Eickhoff, David Kim, and Sandy McCurley "Advanced reticle inspection challenges and solutions for 65nm node", Proc. SPIE 5992, 25th Annual BACUS Symposium on Photomask Technology, 59920C (4 November 2005); https://doi.org/10.1117/12.632322

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available