Designing to win in sub-90nm mask production

Yuan Zhang

doi:10.1117/12.637610

7 November 2005 Designing to win in sub-90nm mask production

Yuan Zhang

Proceedings Volume 5992, 25th Annual BACUS Symposium on Photomask Technology; 599229 (2005) https://doi.org/10.1117/12.637610
Event: SPIE Photomask Technology, 2005, Monterey, California, United States

Abstract

An informal survey conducted with key customers by Photronics indicates that the time gap between technology nodes has accelerated in recent years. Previously the cycle was three years. However, between 130nm and 90nm there was less than a 2 year gap, and between 90nm and 65nm a 1.5 year gap exists. As a result, the technical challenges have increased substantially. In addition, mask costs are rising exponentially due to high capital equipment cost, a shrinking customer base, long write times and increased applications of 193nm EAPSM or AAPSM. Collaboration among EDA companies, mask houses and wafer manufacturers is now more important than ever. This paper will explore avenues for reducing mask costs, mainly in the areas of: write-time reduction through design for manufacturing (DFM), and yield improvement through specification relaxation. Our study conducted through layout vertex modeling suggests that a simple design shape such as a square versus a circle or an angled structure helps reduce shot count and write time. Shot count reduction through mask layout optimization, and advancement in new generation E-beam writers can reduce write time up to 65%. An advanced laser writer can produce those less critical E-beam layers in less than half the time of an e-beam writer. Additionally, the emerging imprint lithography brings new life and new challenges to the photomask industry with applications in many fields outside of the semiconductor industry. As immersion lithography is introduced for 45nm device production, polarization and MEEF effects due to the mask will become severe. Larger magnification not only provides benefits on CD control and MEEF, but also extends the life time of current 90nm/65nm tool sets where 45nm mask sets can be produced at a lower cost.

Citation Download Citation

Yuan Zhang "Designing to win in sub-90nm mask production", Proc. SPIE 5992, 25th Annual BACUS Symposium on Photomask Technology, 599229 (7 November 2005); https://doi.org/10.1117/12.637610

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