Ultra-thin metallic foil thickness measurement system using fiber optic low-coherence interferometry

Yanli Du; Huimin Yan; Yongjun Nie; Xiuda Zhang

doi:10.1117/12.635509

5 December 2005 Ultra-thin metallic foil thickness measurement system using fiber optic low-coherence interferometry

Yanli Du, Huimin Yan, Yongjun Nie, Xiuda Zhang

Proceedings Volume 6019, Passive Components and Fiber-based Devices II; 60194H (2005) https://doi.org/10.1117/12.635509
Event: Asia-Pacific Optical Communications, 2005, Shanghai, China

Abstract

The thickness of metallic foil is measured by differential low-coherence interferometry. Two tandem Michelson Interferometers (MI), of which reflective surfaces measured are the corresponding surfaces of metallic foil, are used as basic interferometric system to obtain interference fringes on a spectrometer. Therefore, the interference fringes only depend on the path differences due to the thickness of metallic foil. The interference fringes are analyzed with a modified extremum method based on the least root mean square (RMS) deviation. The experimental results on thickness measurement are presented.

Citation Download Citation

Yanli Du, Huimin Yan, Yongjun Nie, and Xiuda Zhang "Ultra-thin metallic foil thickness measurement system using fiber optic low-coherence interferometry", Proc. SPIE 6019, Passive Components and Fiber-based Devices II, 60194H (5 December 2005); https://doi.org/10.1117/12.635509

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