Paper
20 January 2006 Design of beam sampling grating and study on its diffraction action
Quan Liu, Jianhong Wu, Chaoming Li
Author Affiliations +
Proceedings Volume 6027, ICO20: Optical Information Processing; 60273C (2006) https://doi.org/10.1117/12.668327
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China
Abstract
The beam sampling grating (BSG) is one of the important diffractive optical elements used in the final target system of the inertial confinement fusion (ICF). The BSG is designed in this paper. By use of optical holographic theory, achromatic optical system on recording holographic BSG mask is designed. Its aberration is analyzed by using optical design software. Meantime, the diffraction efficiency of the BSG is discussed by using rigorous coupled-wave theory. Maintaining spatial uniformity of the diffraction efficiency across the grating aperture (320mm×320mm) is the most challenging processing requirement. The results shows: there are duty cycle and groove depth in grating parameter, the groove depth is more important to spatial uniformity of diffraction efficiency. Some useful information for practical fabrication of the BSG is given also. A prototype beam sampling grating will be fabricated in late 2005.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Quan Liu, Jianhong Wu, and Chaoming Li "Design of beam sampling grating and study on its diffraction action", Proc. SPIE 6027, ICO20: Optical Information Processing, 60273C (20 January 2006); https://doi.org/10.1117/12.668327
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Cited by 2 scholarly publications.
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KEYWORDS
Diffraction

Diffraction gratings

Holography

Optical design

Etching

Diffractive optical elements

Photomasks

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