Preparation and characterization of ceramic thin films, structures, and nanocrystals using CO<sub>2</sub> laser annealing treatment

C. Goyes; A. Casas; E. Solarte; F. Sequeda; A. Devia

doi:10.1117/12.667674

23 January 2006 Preparation and characterization of ceramic thin films, structures, and nanocrystals using CO₂ laser annealing treatment

C. Goyes, A. Casas, E. Solarte, F. Sequeda, A. Devia

Author Affiliations +

Proceedings Volume 6029, ICO20: Materials and Nanostructures; 60290D (2006) https://doi.org/10.1117/12.667674
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China

Abstract

Yttria Stabilized Zirconia (YSZ) and Silicon Carbide (SiC) nanolayers were deposited on several substrates using a Magnetron Sputtering system with YSZ and SiC targets. The combined effects of pressure and RF-DC power and post-annealing with CO₂ laser irradiation on the thin film microstructure was investigated by Infrared Spectroscopy (IR), Atomic Force Microscopy (AFM), X-Ray Photoelectron Spectroscopy (XPS), and Lateral Force Microscopy (LFM). It has been found that the microstructure and optical properties of these materials can be controlled by laser power and irradiation time. Furthermore, shorter annealing times were needed as compared with conventional annealing procedures, results indicate that this processes could be used to produce suitable nanolayers for industrial applications.

Citation Download Citation

C. Goyes, A. Casas, E. Solarte, F. Sequeda, and A. Devia "Preparation and characterization of ceramic thin films, structures, and nanocrystals using CO₂ laser annealing treatment", Proc. SPIE 6029, ICO20: Materials and Nanostructures, 60290D (23 January 2006); https://doi.org/10.1117/12.667674

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