Uniformity of DLC deposited by pulsed vacuum arc ion source

Qian Mi; Changlong Cai; Yixin Yan; Haifeng Liang

doi:10.1117/12.667688

23 January 2006 Uniformity of DLC deposited by pulsed vacuum arc ion source

Qian Mi, Changlong Cai, Yixin Yan, Haifeng Liang

Proceedings Volume 6029, ICO20: Materials and Nanostructures; 60290K (2006) https://doi.org/10.1117/12.667688
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China

Abstract

In this paper, the diamond-like carbon (DLC) film is deposited by pulsed vacuum arc ion source. A great lot of technical experiments are done with various technique parameters, including main loop voltage, pulse frequency, ion source structure and size, substrate height and magnetic intensity, for finding out the influence of technical parameters on film uniformity. Meantime, a handy film thickness measurement instrument is used to measure the distribution of film thickness. Finally, the influences of technique parameters on film uniformity are achieved.

Citation Download Citation

Qian Mi, Changlong Cai, Yixin Yan, and Haifeng Liang "Uniformity of DLC deposited by pulsed vacuum arc ion source", Proc. SPIE 6029, ICO20: Materials and Nanostructures, 60290K (23 January 2006); https://doi.org/10.1117/12.667688

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