On the properties of GeTe/Sb<sub>2</sub>Te<sub>3</sub>superlattice-like structure for phase-change optical recording

Wei Qiang; Yang Cao

doi:10.1117/12.667717

23 January 2006 On the properties of GeTe/Sb₂Te₃ superlattice-like structure for phase-change optical recording

Wei Qiang, Yang Cao

Proceedings Volume 6029, ICO20: Materials and Nanostructures; 60290Z (2006) https://doi.org/10.1117/12.667717
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China

Abstract

GeTe/Sb₂Te₃ superlattice-like (SLL) structure, consisting of alternating thin layers of two different phase-change materials, GeTe and Sb₂Te₃, were grown by magnetron sputtering technique on silicon (100) and polycarbonate substrates. The optical and thermal properties as well as the structural characterization of the film were investigated. Ellipsometric spectroscopy showed that the optical constants could be modulated by changing the ratio and period of the SLL structure in the range of 400 to 800 nm. Differential scanning calorimeter (DSC) measurements indicated SLL structure to have lower activation energy than that of the mGeTe-nSb₂Te₃ pseudobinary with the same ratio. X-ray diffraction (XRD) analysis shows that Ge₂Sb₂Te₅ was formed at the GeTe/Sb₂Te₃ interface after laser-induced crystallization.

Citation Download Citation

Wei Qiang and Yang Cao "On the properties of GeTe/Sb₂Te₃ superlattice-like structure for phase-change optical recording", Proc. SPIE 6029, ICO20: Materials and Nanostructures, 60290Z (23 January 2006); https://doi.org/10.1117/12.667717

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