Characterization of contour shapes achievable with a MEMS deformable mirror

Yaopeng Zhou; Thomas Bifano

doi:10.1117/12.651924

23 January 2006 Characterization of contour shapes achievable with a MEMS deformable mirror

Yaopeng Zhou, Thomas Bifano

Proceedings Volume 6113, MEMS/MOEMS Components and Their Applications III; 61130H (2006) https://doi.org/10.1117/12.651924
Event: MOEMS-MEMS 2006 Micro and Nanofabrication, 2006, San Jose, California, United States

Abstract

An important consideration in the design of an adaptive optics controller is the range of physical shapes required by the DM to compensate the existing aberrations. Conversely, if the range of surface shapes achievable with a DM is known, its suitability for a particular AO application can be determined. In this paper, we characterize one MEMS DM that was recently developed for vision science applications. The device has 140 actuators supporting a continuous face sheet deformable mirror having 4mm square aperture. The total range of actuation is about 4μm, achieved using electrostatic actuation in an architecture that has been described previously. We incorporated the MEMS mirror into an adaptive optics (AO) testbed to measure its capacity to transform an initially planar wavefront into a wavefront having one of thirty-six orthogonal shapes corresponding to the first seven orders of Zernike polynomials. The testbed included a superluminescent diode source emitting light with a wavelength 630nm, a MEMS DM, and a Shack Hartmann wavefront sensor (SHWS). The DM was positioned in a plane conjugate to the SHWS lenslets, using a pair of relay lenses. Wavefront slope measurements provided by the SHWS were used in an integral controller to regulate DM shape. The control software used the difference between the the wavefront measured by the SHWS and the desired (reference) wavefront as feedback for the DM. The DM is able to produce all 36 terms with a wavefront height root mean square (RMS) from 1.35μm for the lower order Zernike shapes to 0.2μm for the 7th order.

Citation Download Citation

Yaopeng Zhou and Thomas Bifano "Characterization of contour shapes achievable with a MEMS deformable mirror", Proc. SPIE 6113, MEMS/MOEMS Components and Their Applications III, 61130H (23 January 2006); https://doi.org/10.1117/12.651924

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