Striae evaluation of TiO<sub>2</sub>-SiO<sub>2</sub> ultra-low expansion glasses using the line-focus-beam ultrasonic material characterization system

Mototaka Arakawa; Jun-ichi Kushibiki; Yuji Ohashi

doi:10.1117/12.656396

23 March 2006 Striae evaluation of TiO₂-SiO₂ ultra-low expansion glasses using the line-focus-beam ultrasonic material characterization system

Mototaka Arakawa, Jun-ichi Kushibiki, Yuji Ohashi

Author Affiliations +

Proceedings Volume 6151, Emerging Lithographic Technologies X; 615123 (2006) https://doi.org/10.1117/12.656396
Event: SPIE 31st International Symposium on Advanced Lithography, 2006, San Jose, California, United States

Abstract

Super accurate evaluation method for TiO₂-doped SiO₂ ultra-low-expansion glass having periodic striae associated with its fabrication process was investigated using the line-focus-beam ultrasonic material characterization (LFB-UMC) system. To obtain absolute values of leaky surface acoustic wave (LSAW) velocities measured with the LFB-UMC system, proper standard specimens of the glass for system calibration was examined. Using a specimen with a surface perpendicular to the striae plane as the standard specimen, a reliable standard LSAW velocity of 3308.18 m/s within ±0.35 m/s for the calibration was obtained regardless of influence of velocity variations due to the periodic striae. Also, we determined the accurate relationship between the TiO₂ concentrations and LSAW velocities (sensitivity: -0.0601 wt%/(m/s)) so that the TiO₂ concentration of the standard specimen with a LSAW velocity of 3308.18 m/s was determined to be 7.09 wt%. Furthermore, to evaluate more reliably the more homogeneous ultra-low-expansion glasses in the near future, the measurement accuracy of the LSAW velocity was improved with a method using the LFB device with a larger curvature radius R operating at lower frequency from ±0.0053% for R=1.0 mm at 225 MHz to ±0.0020% for R=2.0 mm at 75 MHz.

Citation Download Citation

Mototaka Arakawa, Jun-ichi Kushibiki, and Yuji Ohashi "Striae evaluation of TiO₂-SiO₂ ultra-low expansion glasses using the line-focus-beam ultrasonic material characterization system", Proc. SPIE 6151, Emerging Lithographic Technologies X, 615123 (23 March 2006); https://doi.org/10.1117/12.656396

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