Bias reduction in roughness measurement through SEM noise removal

R. Katz; C. D. Chase; R. Kris; R. Peltinov; J. Villarrubia; B. Bunday

doi:10.1117/12.661135

24 March 2006 Bias reduction in roughness measurement through SEM noise removal

R. Katz, C. D. Chase, R. Kris, R. Peltinov, J. Villarrubia, B. Bunday

Proceedings Volume 6152, Metrology, Inspection, and Process Control for Microlithography XX; 61524L (2006) https://doi.org/10.1117/12.661135
Event: SPIE 31st International Symposium on Advanced Lithography, 2006, San Jose, California, United States

Abstract

The importance of Critical Dimension (CD) roughness metrics such as Line and Contact edge roughness (LER, CER) and their associated width metrics (LWR, CWR) have been dealt with widely in the literature and are becoming semiconductor industry standards. With the downscaling of semiconductor fabrication technology, the accuracy of these metrics is of increasing importance. One important challenge is to separate the image noise (present in any SEM image) from the physically present roughness. An approach for the removal of the non-systematic image noise was proposed by J.Villarrubia and B.Bunday [Proc. SPIE 5752, 480 (2005)]. In the presented work this approach is tested and extended to deal with the challenge of noise removal in the presence of various types of systematic phenomena present in the imaging process such as CD variation. The study was carried out by means of simulated LWR and using real measurements.

Citation Download Citation

R. Katz, C. D. Chase, R. Kris, R. Peltinov, J. Villarrubia, and B. Bunday "Bias reduction in roughness measurement through SEM noise removal", Proc. SPIE 6152, Metrology, Inspection, and Process Control for Microlithography XX, 61524L (24 March 2006); https://doi.org/10.1117/12.661135

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available