A dive into clear water: immersion defect capabilities

B. Streefkerk; J. Mulkens; R. Moerman; M. Stavenga; J. van der Hoeven; C. Grouwstra; R. Bruls; M. Leenders; S. Wang; Y. van Dommelen; M. Boerema; H. Jansen; K. Cummings; M. Riepen; H. Boom; M. Suddendorf; P. Huisman

doi:10.1117/12.660376

15 March 2006 A dive into clear water: immersion defect capabilities

B. Streefkerk, J. Mulkens, R. Moerman, M. Stavenga, J. van der Hoeven, C. Grouwstra, R. Bruls, M. Leenders, S. Wang, Y. van Dommelen, M. Boerema, H. Jansen, K. Cummings, M. Riepen, H. Boom, M. Suddendorf, P. Huisman

Author Affiliations +

Proceedings Volume 6154, Optical Microlithography XIX; 61540S (2006) https://doi.org/10.1117/12.660376
Event: SPIE 31st International Symposium on Advanced Lithography, 2006, San Jose, California, United States

Abstract

This paper discusses the types and formation of immersion defects. It is shown that drying stains and water marks are the main immersion defects. The immersion defects are related to resist leaching, water penetration and droplet formation. It is shown that scanner immersion hood design based on an actuated air gap and air curtain droplet clean-up minimizes defect counts. Additionally, pre-and post soaks steps in the track can reduce drying stains and water marks. The defect performance is evaluated on XT:1250i and XT:1400i systems. It is shown that the immersion defect density can go as low as 0.01 /cm², which is well below the ITRS 2005 number of 0.03 /cm².

Citation Download Citation

B. Streefkerk, J. Mulkens, R. Moerman, M. Stavenga, J. van der Hoeven, C. Grouwstra, R. Bruls, M. Leenders, S. Wang, Y. van Dommelen, M. Boerema, H. Jansen, K. Cummings, M. Riepen, H. Boom, M. Suddendorf, and P. Huisman "A dive into clear water: immersion defect capabilities", Proc. SPIE 6154, Optical Microlithography XIX, 61540S (15 March 2006); https://doi.org/10.1117/12.660376

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available