Silicon-on-insulator microphotonic devices

Laurent Vivien; Eric Cassan; Delphine Marris-Morini; Sylvain Maine; Mathieu Rouvière; Jean-François Damlencourt; Jean-Marc Fédéli; Anatole Lupu; Daniel Pascal; Xavier Le Roux; Suzanne Laval

doi:10.1117/12.683062

18 April 2006 Silicon-on-insulator microphotonic devices

Laurent Vivien, Eric Cassan, Delphine Marris-Morini, Sylvain Maine, Mathieu Rouvière, Jean-François Damlencourt, Jean-Marc Fédéli, Anatole Lupu, Daniel Pascal, Xavier Le Roux, Suzanne Laval

Author Affiliations +

Proceedings Volume 6182, Photonic Crystal Materials and Devices III (i.e. V); 618203 (2006) https://doi.org/10.1117/12.683062
Event: SPIE Photonics Europe, 2006, Strasbourg, France

Abstract

SOI microwaveguides and associated devices (splitters, turns,...) are used for light distribution. Rib SOI geometries obtained by shallow etching of the silicon film offer definite advantages for the integration of active devices while fulfilling efficiency and compactness. Propagation losses of such waveguides are one order of magnitude smaller than for single mode strip waveguides. Rib-based compact and low loss optical signal distribution from one input to up to 1024 output points has been demonstrated. Light injection in submicron SOI waveguides is discussed. The indirect bandgap of silicon is not in favor of light emission and modulation. Realization of silicon sources and efficient high speed silicon-based modulators is a real challenge. For light detection, germanium can be grown on silicon and Ge photodetectors with -3dB bandwidths up to 30 GHz have been demonstrated.

Citation Download Citation

Laurent Vivien, Eric Cassan, Delphine Marris-Morini, Sylvain Maine, Mathieu Rouvière, Jean-François Damlencourt, Jean-Marc Fédéli, Anatole Lupu, Daniel Pascal, Xavier Le Roux, and Suzanne Laval "Silicon-on-insulator microphotonic devices", Proc. SPIE 6182, Photonic Crystal Materials and Devices III (i.e. V), 618203 (18 April 2006); https://doi.org/10.1117/12.683062

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