Dynamics of particle ejection in dry laser cleaning

David Grojo; Alain Cros; Philippe Delaporte; Marc Sentis

doi:10.1117/12.674578

7 June 2006 Dynamics of particle ejection in dry laser cleaning

David Grojo, Alain Cros, Philippe Delaporte, Marc Sentis

Proceedings Volume 6261, High-Power Laser Ablation VI; 62610C (2006) https://doi.org/10.1117/12.674578
Event: High-Power Laser Ablation 2006, 2006, Taos, NM, United States

Abstract

Time- and space-resolved forward scattering detection was demonstrated as a suitable technique to characterize the dynamics of the ejected particles during dry laser cleaning. Silica particles with radii of 250 nanometers deposited on silicon substrates were irradiated by single nanosecond laser pulses with fluences above the particle removal threshold. The observation of different particle clouds propagating with different velocities was in support of the coexistence of at least two removal mechanisms. The ejection velocities were measured as a function of laser fluence in order to distinguish between the mechanisms involved in laser-assisted particle removal.

Citation Download Citation

David Grojo, Alain Cros, Philippe Delaporte, and Marc Sentis "Dynamics of particle ejection in dry laser cleaning", Proc. SPIE 6261, High-Power Laser Ablation VI, 62610C (7 June 2006); https://doi.org/10.1117/12.674578

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