Computation of charge and energy deposited during electron beam irradiation depth distributions in discrete looses approximation

S. S. Borisov; S. I. Zaitsev; E. A. Grachev

doi:10.1117/12.693211

31 May 2006 Computation of charge and energy deposited during electron beam irradiation depth distributions in discrete looses approximation

S. S. Borisov, S. I. Zaitsev, E. A. Grachev

Author Affiliations +

Proceedings Volume 6278, Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics; 62780K (2006) https://doi.org/10.1117/12.693211
Event: Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 2005, Moscow, Russian Federation

Abstract

Problems of simulation of deposited during beam irradiation charge and energy (dose) simulation. Results obtained using Monte-Carlo method in discrete and continuous looses. Analytical approximations for depth-dose and charge-dose for Si, Au, Ag, Cu, GaN obtained.

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S. S. Borisov, S. I. Zaitsev, and E. A. Grachev "Computation of charge and energy deposited during electron beam irradiation depth distributions in discrete looses approximation", Proc. SPIE 6278, Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 62780K (31 May 2006); https://doi.org/10.1117/12.693211

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