Deep submicro flying height measuring technologies system

Yuhe Li; Liang Wang; Qingxiang Li

doi:10.1117/12.716170

13 October 2006 Deep submicro flying height measuring technologies system

Yuhe Li, Liang Wang, Qingxiang Li

Proceedings Volume 6280, Third International Symposium on Precision Mechanical Measurements; 62800O (2006) https://doi.org/10.1117/12.716170
Event: Third International Symposium on Precision Mechanical Measurements, 2006, Urumqi, China

Abstract

This paper describes a technique for the measurement of deep sub-micron flying height based on intensity interferometry, focuses on the introduction of operating principles, system configuration and image visual feedback techniques. Because the flying height is super low, micro pitch or roll of the slider will lead to measuring error. Thus a constant relative position between the optic spot and the slider should be assured. Imaging processing technique is used to obtain the coordinates of both the slider and the optic spot. A detection algorithm of the center of circle is detailed in this paper.

Citation Download Citation

Yuhe Li, Liang Wang, and Qingxiang Li "Deep submicro flying height measuring technologies system", Proc. SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 62800O (13 October 2006); https://doi.org/10.1117/12.716170

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