Vertical displacement stage with diffraction grating sensor

Suping Chang; Tiebang Xie; Rong Dai

doi:10.1117/12.717263

6 November 2006 Vertical displacement stage with diffraction grating sensor

Suping Chang, Tiebang Xie, Rong Dai

Proceedings Volume 6357, Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo-Electronic Technology, and Artificial Intelligence; 63573U (2006) https://doi.org/10.1117/12.717263
Event: Sixth International Symposium on Instrumentation and Control Technology, 2006, Beijing, China

Abstract

To satisfy requirements of high accuracy and high resolution displacement in vertical scanning white-light interferometry and calibrations of precision sensors, a vertical displacement stage with nanometer resolution and accuracy is developed. A mechanism with flexural-hinge guided motion is utilized and driven by piezoelectric transducer for vertical micro-displacement in this stage. By lever magnifying part, the flexural-hinge mechanism implements two-grade displacement magnification, so the stage has a large range while it has high accuracy and high-resolution. Due to the hysteresis and nonlinear characteristic of PZT, the whole displacement process is monitored by a diffraction grating sensor and compensated in real-time. The deflection influences of the diffraction grating on the vertical displacement are analyzed and some experiments are carried out to verify the characteristics of the stage.

Citation Download Citation

Suping Chang, Tiebang Xie, and Rong Dai "Vertical displacement stage with diffraction grating sensor", Proc. SPIE 6357, Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo-Electronic Technology, and Artificial Intelligence, 63573U (6 November 2006); https://doi.org/10.1117/12.717263

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