Glancing angle deposited thin films and their applications in laser systems

Jianda Shao; Sumei Wang; Zicai Shen; Xiaoyong Fu; Hongbo He; Zhengxiu Fan

doi:10.1117/12.692590

15 January 2007 Glancing angle deposited thin films and their applications in laser systems

Jianda Shao, Sumei Wang, Zicai Shen, Xiaoyong Fu, Hongbo He, Zhengxiu Fan

Proceedings Volume 6403, Laser-Induced Damage in Optical Materials: 2006; 640312 (2007) https://doi.org/10.1117/12.692590
Event: Boulder Damage Symposium XXXVIII: Annual Symposium on Optical Materials for High Power Lasers, 2006, Boulder, Colorado, United States

Abstract

Glancing angle deposition (GLAD) is a novel way to produce nanostructural thin films with engineered porosity, and it is possible to make new optical components in laser systems. In this paper, ZrO₂, SiO₂ and TiO₂ thin films were grown by electron beam evaporation with GLAD technique. Different microstructures were observed. The optical properties, such as transmittance and refractive index were characterized. As application of the GLAD thin films, several optical components were designed and fabricated, such as graded-index rugate filter, broadband antireflection coating and phase retardater for visible and near infrared laser systems. Finally, laser-induced damage threshold were measured and discussed.

Citation Download Citation

Jianda Shao, Sumei Wang, Zicai Shen, Xiaoyong Fu, Hongbo He, and Zhengxiu Fan "Glancing angle deposited thin films and their applications in laser systems", Proc. SPIE 6403, Laser-Induced Damage in Optical Materials: 2006, 640312 (15 January 2007); https://doi.org/10.1117/12.692590

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