Fabrication processes of MEMS phase shifters on polymer-based substrates

Jianqun Wang; Thermpon Ativanichayaphong; Ying Cai; Wen-Ding Huang; Lun-Chen Hsu; W. Alan Davis; Mu Chiao; J.-C. Chiao

doi:10.1117/12.695577

20 December 2006 Fabrication processes of MEMS phase shifters on polymer-based substrates

Jianqun Wang, Thermpon Ativanichayaphong, Ying Cai, Wen-Ding Huang, Lun-Chen Hsu, W. Alan Davis, Mu Chiao, J.-C. Chiao

Proceedings Volume 6415, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III; 641515 (2006) https://doi.org/10.1117/12.695577
Event: SPIE Smart Materials, Nano- and Micro-Smart Systems, 2006, Adelaide, Australia

Abstract

RF phase shifters find wide applications in telecommunications, satellite systems, personal wireless communication systems, radar systems, tracking systems, and sensors. They have been conventionally manufactured by semiconductor technologies which suffer from high insertion losses due to high RF series resistances. They are expensive due to fabrication and assembly costs. The RF MEMS phase shifters provide low insertion losses, low fabrication costs and high linearity compared with the semiconductor ones. Furthermore, polymer materials have demonstrated low material costs and low RF attenuations. In this work, we proposed to build RF MEMS phase shifters on polymer substrates. The proposed devices were successfully manufactured and tested from DC to 26 GHz. Our experimental results indicated more than 35 degrees phase shifts and low insertion losses.

Citation Download Citation

Jianqun Wang, Thermpon Ativanichayaphong, Ying Cai, Wen-Ding Huang, Lun-Chen Hsu, W. Alan Davis, Mu Chiao, and J.-C. Chiao "Fabrication processes of MEMS phase shifters on polymer-based substrates", Proc. SPIE 6415, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III, 641515 (20 December 2006); https://doi.org/10.1117/12.695577

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