Fabrication of comb-drive micro-actuators based on UV lithography of SU-8 and electroless plating technique

Wen Dai; Wanjun Wang

doi:10.1117/12.705333

12 February 2007 Fabrication of comb-drive micro-actuators based on UV lithography of SU-8 and electroless plating technique

Wen Dai, Wanjun Wang

Author Affiliations +

Proceedings Volume 6464, MEMS/MOEMS Components and Their Applications IV; 64640I (2007) https://doi.org/10.1117/12.705333
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

Comb drive microactuators are widely used in MEMS devices. Most of the comb drives reported in MEMS field are made using fabrication technology with silicon as structural material. Recent development in UV lithography of SU-8 has made it possible to fabricate the ultra high aspect ratio microstrucres with excellent sidewall quality. In this paper, we report a low cost alternative to the silicon based comb drive by using cured SU-8 polymer as structural material. To achieve electrical conductivity in cured SU-8, a new approach to selectively electroless plate metal on high aspect ratio cured SU-8 polymer microstructures is also reported. In this approach, UV light source was used to activate surfaces of the cured SU-8 microstructures. Selective electroless plating of metals on cured SU-8 was achieved by controlling the UV exposure dosage. The technologies for fabrication of comb drive microactuators based on SU-8 polymer as main structural material were sucessfully developed. Preliminary experimental results have proved the feasibility of the microactuator and the fabrication technology.

Citation Download Citation

Wen Dai and Wanjun Wang "Fabrication of comb-drive micro-actuators based on UV lithography of SU-8 and electroless plating technique", Proc. SPIE 6464, MEMS/MOEMS Components and Their Applications IV, 64640I (12 February 2007); https://doi.org/10.1117/12.705333

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