Uniform tilt-angle micromirror array for multi-object spectroscopy

Severin Waldis; Pierre-Andre Clerc; Frederic Zamkotsian; Michael Zickar; Wilfried Noell; Nico de Rooij

doi:10.1117/12.702012

22 January 2007 Uniform tilt-angle micromirror array for multi-object spectroscopy

Severin Waldis, Pierre-Andre Clerc, Frederic Zamkotsian, Michael Zickar, Wilfried Noell, Nico de Rooij

Proceedings Volume 6466, MOEMS and Miniaturized Systems VI; 646603 (2007) https://doi.org/10.1117/12.702012
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

We report on micromirror arrays being developed for the use as reflective slit mask in Multi Object Spectrographs for astronomical applications. The micromirrors are etched in bulk single crystal silicon whereas the cantilever type suspension is realized by surface micromachining. One micromirror element is 100μm x 200μm in size. The micromirrors are actuated electrostatically by electrodes located on a second chip. The use of silicon on insulator (SOI) wafers for both mirror and electrode chip ensures thermal compatibility for cryogenic operation. A system of multiple landing beams has been developed, which passively locks the mirror at a well defined tilt angle when actuated. The mechanical tilt angle obtained is 20^o at a pull-in voltage of 90V. Measurements with an optical profiler showed that the tilt angle of the actuated and locked mirror is stable with a precision of one arc minute over a range of 15V. This locking system makes the tilt angle merely independent from process variations across the wafer and thus provides uniform tilt angle over the whole array. The precision on tilt angle from mirror to mirror measured is one arc minute. The surface quality of the mirrors in actuated state is better than 10nm peak-to-valley and the local roughness is around 1nm RMS.

Citation Download Citation

Severin Waldis, Pierre-Andre Clerc, Frederic Zamkotsian, Michael Zickar, Wilfried Noell, and Nico de Rooij "Uniform tilt-angle micromirror array for multi-object spectroscopy", Proc. SPIE 6466, MOEMS and Miniaturized Systems VI, 646603 (22 January 2007); https://doi.org/10.1117/12.702012

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available