Piston-tip-tilt positioning of a segmented MEMS deformable mirror

Michael A. Helmbrecht; Thor Juneau

doi:10.1117/12.702653

9 February 2007 Piston-tip-tilt positioning of a segmented MEMS deformable mirror

Michael A. Helmbrecht, Thor Juneau

Proceedings Volume 6467, MEMS Adaptive Optics; 64670M (2007) https://doi.org/10.1117/12.702653
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

Results of a calibrated open-loop controller for piston/tip/tilt positioning of a segmented deformable mirror are presented. The controller is based on a fit of a 3^rd-order polynomial that maps desired positions to the electrode voltages that actuate the segments. In addition to mapping positions to voltages, the controller limits positions to within the reachable space of the device. Experimental testing shows that over nearly the entire 5 &mgr;m of stroke and ±4 mrad of tip and tilt operating range, the controller positions segments to better than 30 nm rms of surface-figure error.

Citation Download Citation

Michael A. Helmbrecht and Thor Juneau "Piston-tip-tilt positioning of a segmented MEMS deformable mirror", Proc. SPIE 6467, MEMS Adaptive Optics, 64670M (9 February 2007); https://doi.org/10.1117/12.702653

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