Two-dimensional diffractive optical element based fabrication of 3D photonic crystal templates

Debashis Chanda; Peter R. Herman

doi:10.1117/12.708603

6 February 2007 Two-dimensional diffractive optical element based fabrication of 3D photonic crystal templates

Debashis Chanda, Peter R. Herman

Proceedings Volume 6480, Photonic Crystal Materials and Devices VI; 64800Q (2007) https://doi.org/10.1117/12.708603
Event: Integrated Optoelectronic Devices 2007, 2007, San Jose, California, United States

Abstract

Recently, two-dimensional and three-dimensional periodic dielectric structures have been directly fabricated by laser holographic lithography to create novel geometric structures with high-precision tolerances. Multiple beam interference via beam splitting mirrors or diffractive optical elements produce iso-intensity contours that can be accurately recorded in photoresist and subsequently used as a template for creating photonic crystals with a complete or partial bandgap. We demonstrate single laser exposure method of forming three-dimensional photonic crystal templates in photoresist with multi-layer two-dimensional diffractive optical elements. Several photonic stopbands are identified in the near-infrared spectrum along multiple crystallographic directions.

Citation Download Citation

Debashis Chanda and Peter R. Herman "Two-dimensional diffractive optical element based fabrication of 3D photonic crystal templates", Proc. SPIE 6480, Photonic Crystal Materials and Devices VI, 64800Q (6 February 2007); https://doi.org/10.1117/12.708603

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