Single-mode proton-implanted photonic crystal VCSELs

Paul O. Leisher; Chen Chen; Dominic F. Siriani; Joshua D. Sulkin; Kent D. Choquette

doi:10.1117/12.715085

7 February 2007 Single-mode proton-implanted photonic crystal VCSELs

Paul O. Leisher, Chen Chen, Dominic F. Siriani, Joshua D. Sulkin, Kent D. Choquette

Proceedings Volume 6484, Vertical-Cavity Surface-Emitting Lasers XI; 64840L (2007) https://doi.org/10.1117/12.715085
Event: Integrated Optoelectronic Devices 2007, 2007, San Jose, California, United States

Abstract

Photonic crystals are etched to a variety of depths in the top mirror of proton-implanted vertical-cavity surface-emitting laser (VCSEL) diodes to achieve single-fundamental-mode operation. To investigate both the index confinement provided by the etched pattern and its effect on optical loss, continuous-wave experiments are performed. It is shown that proper pattern design leads to improved fundamental-mode output power, decreased threshold, and increased efficiency relative to unetched, but otherwise identical implant VCSELs. These improvements indicate a significant reduction in diffraction loss to the fundamental mode due to the index guiding provided by the etched pattern. Etching to shallow depths provides the ability to scale to large aperture sizes while etching deeply allows single-mode emission of small diameter devices. The photonic crystal designs are then used in the fabrication of high-speed implant-confined VCSELs with coplanar contacts on polyimide. Optimized devices exhibit a record 15 GHz small-signal modulation bandwidth.

Citation Download Citation

Paul O. Leisher, Chen Chen, Dominic F. Siriani, Joshua D. Sulkin, and Kent D. Choquette "Single-mode proton-implanted photonic crystal VCSELs", Proc. SPIE 6484, Vertical-Cavity Surface-Emitting Lasers XI, 64840L (7 February 2007); https://doi.org/10.1117/12.715085

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available