Angular scatterometry for line-width roughness measurement

Deh-Ming Shyu; Yi-Sha Ku; Nigel Smith

doi:10.1117/12.711734

5 April 2007 Angular scatterometry for line-width roughness measurement

Deh-Ming Shyu, Yi-Sha Ku, Nigel Smith

Proceedings Volume 6518, Metrology, Inspection, and Process Control for Microlithography XXI; 65184G (2007) https://doi.org/10.1117/12.711734
Event: SPIE Advanced Lithography, 2007, San Jose, California, United States

Abstract

We propose using angular scatterometry as a means to investigate LWR (line-width roughness) and CD (critical dimension). The grating target is illuminated by a single wavelength light source which has large angular aperture both in incidence angle θ and azimuth angle φ. A preliminary scatterometry model was first built by assuming perfect critical dimension printed without any line-width roughness. The difference between the model prediction and actual measurement is cased by line-width roughness contribution. We developed a calibration curve as a function of line-width roughness based on the statistical quantity of the incidence and azimuth angle dependence. The results demonstrate that scatterometry can indeed be used to extract line-width roughness and critical dimension information in production line with nano-scale resolution.

Citation Download Citation

Deh-Ming Shyu, Yi-Sha Ku, and Nigel Smith "Angular scatterometry for line-width roughness measurement", Proc. SPIE 6518, Metrology, Inspection, and Process Control for Microlithography XXI, 65184G (5 April 2007); https://doi.org/10.1117/12.711734

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