Ultrasonic Precision Cleaning Of Optical Components Prior To And After Vacuum Coating

K H Guenther; H Enssle

doi:10.1117/12.938355

13 October 1986 Ultrasonic Precision Cleaning Of Optical Components Prior To And After Vacuum Coating

K H Guenther, H Enssle

Proceedings Volume 0652, Thin Film Technologies II; (1986) https://doi.org/10.1117/12.938355
Event: 1986 International Symposium/Innsbruck, 1986, Innsbruck, Austria

Abstract

The degree of cleanliness of optical surfaces to be coated with an interference film or a metallic layer by means of high vacuum deposition is of crucial importance to the coating result. Among the various possible cleaning technologies, ultrasonic precision cleaning has proved to be economical and technically efficient. This paper explains the type of cleaning requirements that can be satisfied with a modern ultrasonic cleaning plant. It is, for example possible to clean sensitive glasses (up to acid resistance class 52) sufficiently well so that they are suitable for coating. The influence of the polishing condition on the surfaces to be cleaned is discussed in detail. The limits of ultrasonic cleaning technology are also pointed out.

Citation Download Citation

K H Guenther and H Enssle "Ultrasonic Precision Cleaning Of Optical Components Prior To And After Vacuum Coating", Proc. SPIE 0652, Thin Film Technologies II, (13 October 1986); https://doi.org/10.1117/12.938355

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