Fabrication and evaluation of a LPFG-based whitelight interferometric distance sensor

Haiying Huang; Ayan Majumdar

doi:10.1117/12.715440

6 April 2007 Fabrication and evaluation of a LPFG-based whitelight interferometric distance sensor

Haiying Huang, Ayan Majumdar

Proceedings Volume 6529, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2007; 65290Z (2007) https://doi.org/10.1117/12.715440
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2007, San Diego, California, United States

Abstract

Optical fiber whitelight interferometers for distance measurement have attracted a lot of attention recently because they offer absolute measurement, ultrahigh accuracy, large dynamic range, and robustness. In this paper, the development of an in-fiber whitelight interferometric distance sensor based on the mode coupling effect of a long period fiber grating (LPFG) is presented. Unlike the Fabry-Perot interferometric (FPI) distance sensor that has a minimum requirement on the measurable distance, the LPFG-based distance sensor can measure a distance that is as small as several nanometers. Therefore, it can be applied for near-field surface profiling of micro/nano-sized components. The principle of operation of the LPFG-based distance sensor is first explained and an innovative micro-photolithographic technique to fabricate the sensor probe is described in detail. The performance of the distance sensors using two different types of LPFGs, laser-machined LPFG and mechanically induced LPFG, were evaluated and the experimental results are presented.

Citation Download Citation

Haiying Huang and Ayan Majumdar "Fabrication and evaluation of a LPFG-based whitelight interferometric distance sensor", Proc. SPIE 6529, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2007, 65290Z (6 April 2007); https://doi.org/10.1117/12.715440

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