Nonlinear errors of passive homodyne polarized laser interferometer

Jun Yang; Bing Wu; Zhi-hai Liu; Li-bo Yuan

doi:10.1117/12.725695

5 March 2007 Nonlinear errors of passive homodyne polarized laser interferometer

Jun Yang, Bing Wu, Zhi-hai Liu, Li-bo Yuan

Proceedings Volume 6595, Fundamental Problems of Optoelectronics and Microelectronics III; 659509 (2007) https://doi.org/10.1117/12.725695
Event: Fundamental Problems of Optoelectronics and Microelectronics III, 2006, Harbin, China

Abstract

Based on Jones matrices theory, the paper researches the error source and action mechanism of the polarized interferometer in nanometer level measurement. It opens the door for selecting optical component, adjusting light set-up and compensating error. According to the theoretical analysis, the main reason that causes error is degeneration of polarization that the imperfect performance of optical components and imperfect adjusting bring. Especially the different delay angle happens more obviously. The characteristic of the passive homodyne laser interferometer based on the polarized phase-shift is that the output of interferometer is four-channel signals in quadrature. Using this characteristic, through strict selecting and fine adjusting components and differential signal processing, the interferometer can perform nanometer measurement.

Citation Download Citation

Jun Yang, Bing Wu, Zhi-hai Liu, and Li-bo Yuan "Nonlinear errors of passive homodyne polarized laser interferometer", Proc. SPIE 6595, Fundamental Problems of Optoelectronics and Microelectronics III, 659509 (5 March 2007); https://doi.org/10.1117/12.725695

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