Langmuir probe diagnostics of plasma generated by means of pulsed Nd:YAG laser interaction with Si-based targets

Adam Cenian; Miroslaw Sawczak; Gerard Sliwinski

doi:10.1117/12.726591

23 January 2007 Langmuir probe diagnostics of plasma generated by means of pulsed Nd:YAG laser interaction with Si-based targets

Adam Cenian, Miroslaw Sawczak, Gerard Sliwinski

Author Affiliations +

Proceedings Volume 6598, Laser Technology VIII: Applications of Lasers; 65980Z (2007) https://doi.org/10.1117/12.726591
Event: Laser Technology VIII, 2006, Szczecin, Poland

Abstract

Investigations of laser ablation plume aimed at applications for the SiO nano-film deposition are reported. The plasma formation and propagation through experimental chamber was investigated by means of Langmuir probe. The effects related to plume splitting and acceleration are discussed.

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Adam Cenian, Miroslaw Sawczak, and Gerard Sliwinski "Langmuir probe diagnostics of plasma generated by means of pulsed Nd:YAG laser interaction with Si-based targets", Proc. SPIE 6598, Laser Technology VIII: Applications of Lasers, 65980Z (23 January 2007); https://doi.org/10.1117/12.726591

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