Paper
25 April 2007 Novel double pulsed laser method for synthesis of carbon nitride films
Yu. Ya. Kuzyakov, V. N. Lednev, N. B. Zorov, R. D. Voronina, V. M. Gordienko
Author Affiliations +
Proceedings Volume 6606, Advanced Laser Technologies 2006; 660615 (2007) https://doi.org/10.1117/12.730197
Event: Advanced Laser Technologies 2006, 2006, Brasov, Romania
Abstract
A new approach based on the use of the double laser pulse was proposed to improve the crystallinity of carbon nitride films producing by PLD method. A pairs of laser pulses with time delay of 10 µs were used for graphite ablation in nitrogen gas. X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS) methods were utilized for characterisation of carbon nitride films synthesised by common (single pulse) PLD and double pulse PLD techniques.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yu. Ya. Kuzyakov, V. N. Lednev, N. B. Zorov, R. D. Voronina, and V. M. Gordienko "Novel double pulsed laser method for synthesis of carbon nitride films", Proc. SPIE 6606, Advanced Laser Technologies 2006, 660615 (25 April 2007); https://doi.org/10.1117/12.730197
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Cited by 2 scholarly publications.
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KEYWORDS
Pulsed laser operation

Carbon

Nitrogen

Plasma

Crystals

Laser ablation

Thin films

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