Using phase objects to qualify the transfer function of Fizeau interferometers for high spatial frequencies

Stéphane Bouillet; Jérôme Daurios D.D.S.

doi:10.1117/12.725968

18 June 2007 Using phase objects to qualify the transfer function of Fizeau interferometers for high spatial frequencies

Stéphane Bouillet, Jérôme Daurios D.D.S.

Author Affiliations +

Proceedings Volume 6616, Optical Measurement Systems for Industrial Inspection V; 661628 (2007) https://doi.org/10.1117/12.725968
Event: Optical Metrology, 2007, Munich, Germany

Abstract

LIL and LMJ are two French high power laser facilities dedicated to laser-plasma interaction experiments. In order to control the flatness requirements of their optics in a wide spatial periods bandwidth, the CEA has several Fizeau interferometers of different diameters. We use special phase objects to qualify their spatial resolutions. A few papers already dealt with the determination of a Fizeau interferometer transfer function. This was achieved by using either a phase step object or a "virtual" sinusoidal phase object (made of the superposition of two wavefronts with different amplitudes and a small tilt). For practical reasons, we chose to use true sinusoidal phase objects to qualify our instruments. Sinusoidal profiles were then eroded in silica plates. Three different periods are available: 10 mm, 2.5 mm and 1 mm, with two different amplitudes for each period. These phase plates are used to qualify the interferometers performance in terms of spatial resolution in the different configurations (wide or narrow field of view, reflection or transmission) used for LIL/LMJ optics inspection. A comparison to the transfer functions obtained using steps of different widths is also proposed. An experimental verification of the Talbot effect is achieved with the 1-mm plate to investigate propagation effects, as well as contribution of the depth of field.

Citation Download Citation

Stéphane Bouillet and Jérôme Daurios D.D.S. "Using phase objects to qualify the transfer function of Fizeau interferometers for high spatial frequencies", Proc. SPIE 6616, Optical Measurement Systems for Industrial Inspection V, 661628 (18 June 2007); https://doi.org/10.1117/12.725968

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