3D femtosecond laser microfabrication of photonic biochips

Koji Sugioka; Yasutaka Hanada; Katsumi Midorikawa

doi:10.1117/12.738343

2 July 2007 3D femtosecond laser microfabrication of photonic biochips

Koji Sugioka, Yasutaka Hanada, Katsumi Midorikawa

Proceedings Volume 6619, Third European Workshop on Optical Fibre Sensors; 66190A (2007) https://doi.org/10.1117/12.738343
Event: Third European Workshop on Optical Fibre Sensors, 2007, Napoli, Italy

Abstract

Three-dimensional microfabrication of photostructurable glass by femtosecond (fs) laser direct writing is demonstrated for manufacture of photonic biochips. The fs laser direct writing followed by annealing and successive wet etching can fabricate the hollow microstructures, achieving a vareiety of microfluidic components and microoptical components in a glass chip. The optical waveguide written by the fs laser direct writing without the annealing and the successive etching can be integrated into these microfluidic and microoptical circuits. Such an integrated microchip is of great use for biochemical analysis and medical inspection based on photonic sensing. Furthermore, as one of the interesting and important applications, the microchips fabricated by the present technique are applied for inspection of living microorganisms.

Citation Download Citation

Koji Sugioka, Yasutaka Hanada, and Katsumi Midorikawa "3D femtosecond laser microfabrication of photonic biochips", Proc. SPIE 6619, Third European Workshop on Optical Fibre Sensors, 66190A (2 July 2007); https://doi.org/10.1117/12.738343

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