Closed loop high precision position control system with optical scale

Cheng-liang Ge; Yuan Liao; Zhong-wu He; Zhong-xiang Luo; Zhi-wei Huang; Min Wan; Xiao-yang Hu; Guo-bin Fan; Zheng Liang

doi:10.1117/12.791115

12 March 2008 Closed loop high precision position control system with optical scale

Cheng-liang Ge, Yuan Liao, Zhong-wu He, Zhong-xiang Luo, Zhi-wei Huang, Min Wan, Xiao-yang Hu, Guo-bin Fan, Zheng Liang

Proceedings Volume 6624, International Symposium on Photoelectronic Detection and Imaging 2007: Optoelectronic System Design, Manufacturing, and Testing; 662418 (2008) https://doi.org/10.1117/12.791115
Event: International Symposium on Photoelectronic Detection and Imaging: Technology and Applications 2007, 2007, Beijing, China

Abstract

With the developments of science of art, there are more and more demands on the high resolution control of position of object to be controlled, such as lathe, product line, elements in the optical resonant cavity, telescope, and so on. As one device with high resolution, the optical scale has more and more utility within the industrial and civil applications. With one optical scale and small DC servo motor, one closed loop high resolution position control system is constructed. This apparatus is used to control the position of the elements of optical system. The optical scale is attached on the object or reference guide way. The object position is sampled by a readhead of non-contact optical encoder. Control system processes the position information and control the position of object through the motion control of servo DC motor. The DC motor is controlled by one controller which is connected to an industrial computer. And the micro frictionless slide table does support the smooth motion of object to be controlled. The control algorithm of system is PID (Proportional-Integral-Differential) methods. The PID control methods have well ROBUST. The needed data to control are position, velocity and acceleration of the object. These three parameters correspond to the PID characters respectively. After the accomplishments of hardware, GUI (Graphical user interface), that is, the software of control system is also programmed. The whole system is assembled by specialized worker. Through calibration experiments, the coefficients of PID are obtained respectively. And then the precision of position control of the system is about 0.1μm.

Citation Download Citation

Cheng-liang Ge, Yuan Liao, Zhong-wu He, Zhong-xiang Luo, Zhi-wei Huang, Min Wan, Xiao-yang Hu, Guo-bin Fan, and Zheng Liang "Closed loop high precision position control system with optical scale", Proc. SPIE 6624, International Symposium on Photoelectronic Detection and Imaging 2007: Optoelectronic System Design, Manufacturing, and Testing, 662418 (12 March 2008); https://doi.org/10.1117/12.791115

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