Paper
10 September 2007 Spatial redistribution of nano-particles using electrokinetic micro-focuser
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Abstract
Current microfabrication technologies rely on top-down, photolithographic techniques that are ultimately limited by the wavelength of light. While systems for nanofabrication do exist, they frequently suffer from high costs and slow processing times, creating a need for a new manufacturing paradigm. The combination of top-down and bottom-up fabrication approaches in device construction creates a new paradigm in micro- and nano-manufacturing. The pre-requisite for the realization of the manufacturing paradigm relies on the manipulation of molecules in a deterministic and controlled manner. The use of AC electrokinetic forces, such as dielectrophoresis (DEP) and AC electroosmosis, is a promising technology for manipulating nano-sized particle in a parallel fashion. A three-electrode micro-focusing system was designed to expoit this forces in order to control the spatial distribution of nano-particles in different frequency ranges. Thus far, we have demonstrated the ability to concentrate 40 nm and 300 nm diameter particles using a 50 μm diameter focusing system. AC electroosmotic motion of the nano-particles was observed while using low frequencies (in a range of 30 Hz - 1 KHz). By using different frequencies and changing the ground location, we have manipulated the nano-particles into circular band structures with different width, and focused the nanoparticles into circular spots with different diameters. Currently, we are in the progress of optimizing the operation parameters (e.g. frequency and AC voltages) by using the technique of particle image velocimetry (PIV). In the future, design of different electrode geometries and the numerical simulation of electric field distribution will be carried out to manipulate the nano-particles into a variety of geometries.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Daniel Ernest Garcia, Aleidy Silva, and Chih-Ming Ho "Spatial redistribution of nano-particles using electrokinetic micro-focuser", Proc. SPIE 6648, Instrumentation, Metrology, and Standards for Nanomanufacturing, 66480V (10 September 2007); https://doi.org/10.1117/12.735440
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KEYWORDS
Dielectrophoresis

Particles

Electrodes

Nanoparticles

Molecules

Nanolithography

Photoresist materials

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