Dynamic characterization and damping control of a MEMS structure

Ilgar Veryeri; Ipek Basdogan

doi:10.1117/12.754368

10 October 2007 Dynamic characterization and damping control of a MEMS structure

Ilgar Veryeri, Ipek Basdogan

Proceedings Volume 6715, Optomechatronic Actuators and Manipulation III; 671509 (2007) https://doi.org/10.1117/12.754368
Event: International Symposium on Optomechatronic Technologies, 2007, Lausanne, Switzerland

Abstract

Micro Electro Mechanical Systems (MEMS) are among the new and emerging technologies of the future and have many applications in different disciplines. This study presents the dynamic characterization methods that we use to identify the modal parameters of a MEMS device and also the techniques that can be implemented to change the modal parameters. A micro scanner mirror was chosen as the case study to demonstrate the developed methodologies. Initially, the micro mirror was dynamically characterized using experimental modal analysis techniques to identify the modal parameters such as resonance frequencies and mode shapes. Then, it was introduced in a velocity feedback control loop to alter the effective damping of the structure. This method proves to be a very efficient method to alter the modal damping of a micro structure, especially when high quality factors are required for MEMS applications.

Citation Download Citation

Ilgar Veryeri and Ipek Basdogan "Dynamic characterization and damping control of a MEMS structure", Proc. SPIE 6715, Optomechatronic Actuators and Manipulation III, 671509 (10 October 2007); https://doi.org/10.1117/12.754368

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