MEMS tunable polymer grating for advantageous spectroscopic measurements

Steven C. Truxal; Katsuo Kurabayashi; Yi-Chung Tung

doi:10.1117/12.754385

10 October 2007 MEMS tunable polymer grating for advantageous spectroscopic measurements

Steven C. Truxal, Katsuo Kurabayashi, Yi-Chung Tung

Proceedings Volume 6715, Optomechatronic Actuators and Manipulation III; 67150F (2007) https://doi.org/10.1117/12.754385
Event: International Symposium on Optomechatronic Technologies, 2007, Lausanne, Switzerland

Abstract

High-speed, high-resolution, miniature photospectroscopy techniques suited for a microfluidic platform enable rapid, cost-effective and efficient assays for use in the clinic, or home, in the field with emergency medical personnel, or on biochemical production lines. We demonstrated an innovative MEMS tunable diffraction grating implemented for spectroscopic measurements requiring simple optics and signal processing. The device is composed of a polydimethylsiloxane (PDMS) microbridge with a nanoimprinted grating pattern on the top surface. MEMS silicon comb drive actuators mechanically strain the microbridge in order to variably tune the grating period. Our innovative nano photonic technology incorporating the tunable grating may guide future advancements of wavelength-discriminating detection for the identification and quantification of chemical and biological species.

Citation Download Citation

Steven C. Truxal, Katsuo Kurabayashi, and Yi-Chung Tung "MEMS tunable polymer grating for advantageous spectroscopic measurements", Proc. SPIE 6715, Optomechatronic Actuators and Manipulation III, 67150F (10 October 2007); https://doi.org/10.1117/12.754385

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