Fabrication of flat and supersmooth surfaces with bowl-feed polishing process

Zhengxiang Shen; Bin Ma; Zhanshan Wang; Yiqin Ji; Tao Liu; Huasong Liu

doi:10.1117/12.782903

14 November 2007 Fabrication of flat and supersmooth surfaces with bowl-feed polishing process

Zhengxiang Shen, Bin Ma, Zhanshan Wang, Yiqin Ji, Tao Liu, Huasong Liu

Proceedings Volume 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 67220U (2007) https://doi.org/10.1117/12.782903
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

Low-scatter supersmooth optical components are wildly used for critical applications such as high power laser systems, mirrors for ring laser gyros, and low-scatter windows. In this paper, a bowl-feed polishing process with fine abrasives to get flat and extremely smooth surfaces is presented. We consider the machining of super-smooth surfaces as a chain consisted of some key nodes, not merely a polishing process. So after the samples of fused silica have been grinded, fine grinded and lapping previously, each step is controlled strictly, a bowl-feed polishing process is adopted to produce the supersmooth surfaces. During the whole polishing process, in order to achieve consistently reliable and meaningful values of both roughness and flatness, every effort is made to get the proper polishing parameters. Abrasives with different grain size distribution and the temperature are taken into account particularly. Two characters of the samples, roughness and flatness, are concerned about in this study. Process controlling by interferometer implies that surface shape is maintained to better than λ/15 RMS (λ=632.8nm), 100 mm in diameter for an extended periods of time, of the order of days. The surface roughness is tested by an interference microscopy. In best cases, the final test result of surface roughness is better than 0.8nm RMS.

Citation Download Citation

Zhengxiang Shen, Bin Ma, Zhanshan Wang, Yiqin Ji, Tao Liu, and Huasong Liu "Fabrication of flat and supersmooth surfaces with bowl-feed polishing process", Proc. SPIE 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 67220U (14 November 2007); https://doi.org/10.1117/12.782903

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available