Phase transition characteristics of tungsten and tantalum doped VO2 polycrystalline thin films formed by ion beam enhanced deposition

Jinhua Li; Didi Dan; Ningyi Yuan; Taiban Xie

doi:10.1117/12.783075

27 November 2007 Phase transition characteristics of tungsten and tantalum doped VO₂ polycrystalline thin films formed by ion beam enhanced deposition

Jinhua Li, Didi Dan, Ningyi Yuan, Taiban Xie

Author Affiliations +

Proceedings Volume 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 672310 (2007) https://doi.org/10.1117/12.783075
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

V₂O₅ and WO₃ or Ta₂O₅ mixed powders were pressed as sputtering target. The doped vanadium oxide thin films were deposited on SiO₂ substrates by a modified Ion Beam Enhanced Deposition (IBED) method. The XRD results showed that IBED polycrystalline doped VO₂ films had a single <002> orientation, and the crystal lattice constant d was elongated about 0.34% and 0.24% for W- and Ta-doped films relative to un-doped VO₂ power. Temperature of phase transition from semiconductor phase to metal phase was 32°C and 48°C, and the phase hysteresis was 2.1°C and 1.2°C; the resistivity change magnitude was 1.6 and 1.2 and the temperature coefficient of resistance (TCR) of the doped films at 300K was 10.1%/K and 3.4%/K for V_0.97W_0.03O₂ and V_0.97Ta_0.03O₂ polycrystalline films respectively. The reasons would be synthetically in consideration of many factors, such as the differences of atomic size, valence number and bond length between W and Ta. The effect of W doping was more evident than the effect of Ta-doing.

Citation Download Citation

Jinhua Li, Didi Dan, Ningyi Yuan, and Taiban Xie "Phase transition characteristics of tungsten and tantalum doped VO₂ polycrystalline thin films formed by ion beam enhanced deposition", Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 672310 (27 November 2007); https://doi.org/10.1117/12.783075

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