Topography of micromirror for metal MEMS optical switch based on fractal theory

Yi Zhang; Yuan Luo; Xiaodong Xu

doi:10.1117/12.782722

19 November 2007 Topography of micromirror for metal MEMS optical switch based on fractal theory

Yi Zhang, Yuan Luo, Xiaodong Xu

Proceedings Volume 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 67240X (2007) https://doi.org/10.1117/12.782722
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

In this paper, the topographies of various micro-mirror surfaces are measured by Scanning Tunneling Microscope (STM) based on NiCrAu MEMS optical switch unit which is desined and fabricated by the authors. Fractal theory and Weierstrass-Mandelbrot function is applied to analyze and simulate the topography of different surfaces. The result shows that the surface of MEMS micromirror which is fabricated by metal sputter has low anisotropism and the W-M function is very efficient in creating models and is very useful for analyzing the topography of MEMS surface.

Citation Download Citation

Yi Zhang, Yuan Luo, and Xiaodong Xu "Topography of micromirror for metal MEMS optical switch based on fractal theory", Proc. SPIE 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 67240X (19 November 2007); https://doi.org/10.1117/12.782722

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available