Near-Specular Performance Of A Portable Scatterometer

Kathleen A Magee; William L Wolfe

doi:10.1117/12.939502

3 June 1987 Near-Specular Performance Of A Portable Scatterometer

Kathleen A Magee, William L Wolfe

Proceedings Volume 0675, Stray Radiation V; (1987) https://doi.org/10.1117/12.939502
Event: 30th Annual Technical Symposium, 1986, San Diego, United States

Abstract

A helium-neon portable scatterometer that was built and described previously has been modified. The intent was to obtain better data at angles very close to specular. We incorporated a twelve-element, linear array of silicon detectors in place of the first detector near the specular reflection direction, and removed the collimator to reduce the beam diameter. Attention was paid to scattered light from the instrument. A new scheme to orient the instrument to the sample surface using the array and the specular beam is described. Design details of the detection system capable of detecting signals ranging over five orders of magnitude and utilizing lock-in detection software are given. Results showing that the modification improved the scatterometer performance so that a Bidirectional Reflectance Distribution Function (BRDF) value of 1 sr^-1 at one degree from specular can be measured with reasonable accuracy for a specular sample are discussed.

Citation Download Citation

Kathleen A Magee and William L Wolfe "Near-Specular Performance Of A Portable Scatterometer", Proc. SPIE 0675, Stray Radiation V, (3 June 1987); https://doi.org/10.1117/12.939502

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