Accurate vibration detection of a rough surface

Hualin Zeng; Yan Zhou; Songtao Fan; Jun He

doi:10.1117/12.757367

4 January 2008 Accurate vibration detection of a rough surface

Hualin Zeng, Yan Zhou, Songtao Fan, Jun He

Proceedings Volume 6831, Nanophotonics, Nanostructure, and Nanometrology II; 683118 (2008) https://doi.org/10.1117/12.757367
Event: Photonics Asia 2007, 2007, Beijing, China

Abstract

Based on the semiconductor laser whose spectral line with width is compressed to be less than 1.2Mhz, a system was designed to measure and improve the amplitude and frequency of the real-time microvibration with sinusoidal modulation. real-time microvibration measurement was executed without alignment problem in the interferometry; and low-frequency disturbance of environment could be eliminated. Suggestions were also given to consummate the system. The system also has resistance against the low frequency disturbance of the environment.

Citation Download Citation

Hualin Zeng, Yan Zhou, Songtao Fan, and Jun He "Accurate vibration detection of a rough surface", Proc. SPIE 6831, Nanophotonics, Nanostructure, and Nanometrology II, 683118 (4 January 2008); https://doi.org/10.1117/12.757367

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
5 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Modulation

Interferometers

Signal processing

Semiconductor lasers

Signal detection

Distance measurement

Interferometry

Show All Keywords

Keywords/Phrases

Search In:

Publication Years