CCD's for High Resolution Imaging in the Near and Far UV

J. T. Bosiers; N. S. Saks; D. McCarthy; M. C. Peckerar; D. J. Michels

doi:10.1117/12.936551

10 December 1986 CCD's for High Resolution Imaging in the Near and Far UV

J. T. Bosiers, N. S. Saks, D. McCarthy, M. C. Peckerar, D. J. Michels

Proceedings Volume 0687, Ultraviolet Technology; (1986) https://doi.org/10.1117/12.936551
Event: 30th Annual Technical Symposium, 1986, San Diego, United States

Abstract

This paper describes the development of backside illuminated, deep-depletion charge coupled devices (CCD's) optimized for imaging in the ultraviolet. A model is presented to describe the UV detection process at the CCD backside, and the factors controlling the UV quantum efficiency. A 32 x 32-pixel area imager was obtained with excellent operating characteristics, such as high transport efficiency and low readout rwise. By appropriate treatments of the CCD backside, a quantum efficiency of 20% at 1216 Å was obtained on the best devices. Good resolution was obtained in the visible and UV regions of the spectrum.

Citation Download Citation

J. T. Bosiers, N. S. Saks, D. McCarthy, M. C. Peckerar, and D. J. Michels "CCD's for High Resolution Imaging in the Near and Far UV", Proc. SPIE 0687, Ultraviolet Technology, (10 December 1986); https://doi.org/10.1117/12.936551

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