Multifunctional micro-optical elements for laser beam homogenizing and beam shaping

A. Bich; J. Rieck; C. Dumouchel; S. Roth; K. J. Weible; M. Eisner; R. Voelkel; M. Zimmermann; M. Rank; M. Schmidt; R. Bitterli; N. Ramanan; P. Ruffieux; T. Scharf; W. Noell; H.-P. Herzig; Nico De Rooij

doi:10.1117/12.762923

14 February 2008 Multifunctional micro-optical elements for laser beam homogenizing and beam shaping

A. Bich, J. Rieck, C. Dumouchel, S. Roth, K. J. Weible, M. Eisner, R. Voelkel, M. Zimmermann, M. Rank, M. Schmidt, R. Bitterli, N. Ramanan, P. Ruffieux, T. Scharf, W. Noell, H.-P. Herzig, Nico De Rooij

Author Affiliations +

Proceedings Volume 6879, Photon Processing in Microelectronics and Photonics VII; 68790Q (2008) https://doi.org/10.1117/12.762923
Event: Lasers and Applications in Science and Engineering, 2008, San Jose, California, United States

Abstract

Refractive, diffractive and reflective micro-optical elements for laser beam shaping and homogenizing have been manufactured and tested. The presented multifunctional optical elements are used for shaping arbitrary laser beam profiles into a variety of geometries like, a homogeneous spot array or line pattern, a laser light sheet or flat-top intensity profiles. The resulting profiles are strongly influenced by the beam properties of the laser and by diffraction and interference effects at the micro-optical elements. We present general design rules for beam shaping and homogenizing. We demonstrate the application of such multifunctional micro-optical elements for a variety of applications from micro-laser machining to laser diagnostic systems.

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A. Bich, J. Rieck, C. Dumouchel, S. Roth, K. J. Weible, M. Eisner, R. Voelkel, M. Zimmermann, M. Rank, M. Schmidt, R. Bitterli, N. Ramanan, P. Ruffieux, T. Scharf, W. Noell, H.-P. Herzig, and Nico De Rooij "Multifunctional micro-optical elements for laser beam homogenizing and beam shaping", Proc. SPIE 6879, Photon Processing in Microelectronics and Photonics VII, 68790Q (14 February 2008); https://doi.org/10.1117/12.762923

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