Application concepts for complementary micropneumatic devices and circuits

Albert K. Henning

doi:10.1117/12.771200

12 February 2008 Application concepts for complementary micropneumatic devices and circuits

Albert K. Henning

Proceedings Volume 6886, Microfluidics, BioMEMS, and Medical Microsystems VI; 68860F (2008) https://doi.org/10.1117/12.771200
Event: MOEMS-MEMS 2008 Micro and Nanofabrication, 2008, San Jose, California, United States

Abstract

Previously, we proposed novel microvalve structures, amenable to bulk micromachining, which demonstrated fully complementary behavior. Two distinct microvalves were devised, one analogous to the p-MOSFET, and the other analogous to the n-MOSFET found in complementary MOSFET devices and circuits. Ring oscillator behavior based on digital NOR logic gates was described, for both micro-pneumatics (based on compressible gas flow) and micro-hydraulics (based on incompressible liquid flow). In this work, micro-pneumatic analog circuits are described, based on the previously-described complementary digital pneumatic microvalve devices. In particular, a micro-pneumatic operational amplifier is described and simulated in detail. Also, prospects for energy harvesting or scavenging based on micro-pneumatic circuits are discussed.

Citation Download Citation

Albert K. Henning "Application concepts for complementary micropneumatic devices and circuits", Proc. SPIE 6886, Microfluidics, BioMEMS, and Medical Microsystems VI, 68860F (12 February 2008); https://doi.org/10.1117/12.771200

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