Simulation and interferometer results of MEMS deformable mirrors

Bautista Fernández; Joel Kubby

doi:10.1117/12.766886

8 February 2008 Simulation and interferometer results of MEMS deformable mirrors

Bautista Fernández, Joel Kubby

Proceedings Volume 6888, MEMS Adaptive Optics II; 68880R (2008) https://doi.org/10.1117/12.766886
Event: MOEMS-MEMS 2008 Micro and Nanofabrication, 2008, San Jose, California, United States

Abstract

Various types of large stroke actuators for Adaptive Optics (AO) were simulated individually and as part of a mirror system consisting of actuators bonded to face plates with different boundary conditions. The actuators and faceplate were fabricated using a high aspect ratio process that enables the fabrication of 3-dimensional Micro-Electro-Mechanical System (MEMS) devices. This paper will review simulation results along with measurements of the displacement of the actuators utilizing a white-light interferometer. Both simulations and interferometer scans have shown the ability of the actuators to achieve displacements of 1/3 of the initial gap between the spring layer and the counter electrode.

Citation Download Citation

Bautista Fernández and Joel Kubby "Simulation and interferometer results of MEMS deformable mirrors", Proc. SPIE 6888, MEMS Adaptive Optics II, 68880R (8 February 2008); https://doi.org/10.1117/12.766886

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available