Paper
12 February 2008 Coupling performance and fabrication method of a waveguide grating coupler with non-uniform duty ratio
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Abstract
We proposed a novel grating design of an out-of-plane coupler with non-uniform duty ratio operating at a wavelength of 1.55 μm for the highly efficient coupling from a waveguide to an optical fiber. In order to evaluate the coupling performance, the diffracted output beam profile and the focusing performance due to the variations of duty ratio configuration were investigated by a 2D Bloch-wave analysis. In addition, a simple fabrication method was proposed to realize the grating by the Near-Field Holographic lithography system with variable aperture unit.
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Jeong Su Yang, Jun-Ho Sung, Beom-hoan O, Seung Gol Lee, and El-Hang Lee "Coupling performance and fabrication method of a waveguide grating coupler with non-uniform duty ratio", Proc. SPIE 6897, Optoelectronic Integrated Circuits X, 68970B (12 February 2008); https://doi.org/10.1117/12.762874
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KEYWORDS
Waveguides

Diffraction gratings

Near field optics

Lithography

Near field

Diffraction

Holography

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